chlorosilane
noun
chlo·ro·silane
plural -s
Definition of chlorosilane
1
: a gas SiH3Cl derived from monosilane
— called also monochlorosilane
2
: a chlorine derivative of a silane
especially
: a derivative [as dimethyl-dichloro-silane (CH3)2SiCl2] of an organic silane used in making silicones
— called also organochlorosilane
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