1 atomic layer deposition | Definition of atomic layer deposition
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atomic layer deposition

noun

Definition of atomic layer deposition

: a technique for depositing a film onto a surface in monolayers by utilizing a self-limiting chemical reaction 20nm of aluminium oxide was used as a gate insulator, built-up by atomic layer deposition over a seed layer of oxidised aluminium on the graphene surface.— Steve Bush

First Known Use of atomic layer deposition

1991, in the meaning defined above

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